| 摘要 |
PROBLEM TO BE SOLVED: To provide a screen printing method which enables printing with a good positional accuracy. SOLUTION: Reference pattern holes 124 to be references of positional alignment of a screen mask 120 with a substrate 10 are provided in the screen mask 120, and positional alignment patterns 60b having almost the same shape and size as reference patterns 60a printed through the reference pattern holes 124 are provided on the substrate 10 in accordance with the positional relationship of pattern holes 121 and the reference pattern holes 124. Printing is conducted with the screen mask 120 brought into contact with a dummy substrate 200, and positions of the reference patterns 60a printed on the dummy substrate 200 are detected. Then, the substrate 10 is so positioned that the detected positions of the reference patterns 60a be almost the same as those of the positional alignment patterns 60b, and the screen mask 120 is brought into contact with the substrate in this positioning state, so as to execute printing. COPYRIGHT: (C)2006,JPO&NCIPI
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