| 摘要 |
A device for exposure of a strip-shaped workpiece with a meander correction device which is capable of carrying out meander correction with high precision even in the case of a thin workpiece or the formation of static electricity. The device includes two means for edge determination which are located at two locations in the transport direction of the strip-shaped workpiece and which photographs the edge of the strip-shaped workpiece, a pattern formed by the intersection of a linear part of a mask and the workpiece edge, a CCD camera for capturing the pattern formed, an image processing part for recording the pattern and searching for matching preset patterns, and a controller for computing the amount of meander of the strip-shaped workpiece, outputting a control signal if the amount of meander is outside of a preset range, and correcting the meander by rotating the workpiece and/or moving the workpiece in the transverse direction.
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