| 摘要 |
The present invention provides improved MEMS devices and methods for use with fiber-optic communications systems. In one embodiment, an apparatus for steering light has a beam layer ( 160 ) with a reflective surface. The device uses a multi-layer electrode stack underlying the beam layer to rotate the beam layer into a desired position. Additionally, an underlying rotation and support structure provides a stable platform for the beam layer when the device is activated. In one embodiment, the underlying structure provides a multi-point landing system to maintain a generally flat beam layer upper surface when the device is activated.
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