发明名称 Semiconductor apparatus having a built-in electric coil and a method of making the semiconductor apparatus
摘要 A semiconductor apparatus includes lower conductive film strips, an inter-layer insulating layer, implanted conductive members, and upper conductive film strips. The lower conductive film strips are formed in a pattern closely adjacent in a line width orientation, electrically separated from each other. The inter-layer insulating layer is formed the lower conductive film strips. The implanted conductive members are implanted in connection holes formed in the inter-layer insulating layer at positions corresponding to both edge sides of the lower conductive film strips. The upper conductive film strips are formed on the implanted conductive members and the inter-layer insulating layer to connect the lower conductive film strips in series so that the lower conductive film strips, the implanted conductive members, and the upper conductive film strips form an electric coil.
申请公布号 US2006060939(A1) 申请公布日期 2006.03.23
申请号 US20050239359 申请日期 2005.09.30
申请人 SETO MASAMI;TANEDA TOSHIHIKO 发明人 SETO MASAMI;TANEDA TOSHIHIKO
分类号 H01L23/29;H01L29/00;H01L21/02;H01L21/3205;H01L21/822;H01L23/31;H01L23/52;H01L23/522;H01L27/04;H01L27/08;H02M3/155 主分类号 H01L23/29
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