MASK, METHOD FOR MANUFACTURING MASK, METHOD FOR FORMING THIN-FILM PATTERN, AND METHOD FOR MANUFACTURING ELECTRO-OPTIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a mask which can mask an upsized region to be film-formed and economically maintain a high quality of a formed film; a method for manufacturing the mask; a method for forming a thin-film pattern; and a method for manufacturing an electro-optic device. SOLUTION: The mask 1 is formed of a plurality of chips 20 having a plurality of openings 22 jointed to a supporting substrate 10, wherein the chips 20 are made to be removable from the supporting substrate 10. COPYRIGHT: (C)2006,JPO&NCIPI