| 摘要 |
PROBLEM TO BE SOLVED: To accurately calibrate a pyrometer used in a heat treatment system. SOLUTION: This calibration device of the present invention for calibrating a temperature probe for a heat treatment chamber has a light source of stable intensity, and the light source is coupled optically with the first end part of a fiber optical guide and emits light through the second end part of the fiber optical guide during the calibration. An alignment mechanism is used to align the fiber optical guide to an input end of the temperature probe. The alignment mechanism has the first alignment structure to be engaged with the first corresponding aligning part in the chamber. COPYRIGHT: (C)2006,JPO&NCIPI
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