| 发明名称 |
MAGNETIC FIELD FURNACE AND A METHOD OF USING THE SAME TO MANUFACTURE DENDRITIC WEB CRYSTALS |
| 摘要 |
<p>An apparatus and method is provided for manufacturing a semiconductor substrate such as web crystals. The apparatus includes a chamber and a growth hardware assembly housed within the chamber. A magnetic field system produces a vertical magnetic field within the chamber.</p> |
| 申请公布号 |
EP1348047(B1) |
申请公布日期 |
2006.03.22 |
| 申请号 |
EP20010994474 |
申请日期 |
2001.12.28 |
| 申请人 |
EBARA CORPORATION |
发明人 |
GLAVISH, HILTON, F.;ISOZAKI, HIDEYUKI;MAISHIGI, KEIJI;FUJITA, KENTARO |
| 分类号 |
C30B15/00;C30B29/06;C30B15/30;C30B29/02;C30B29/64;C30B30/04 |
主分类号 |
C30B15/00 |
| 代理机构 |
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代理人 |
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| 地址 |
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