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经营范围
发明名称
Particle beam apparatus
摘要
申请公布号
EP1288996(B1)
申请公布日期
2006.03.22
申请号
EP20010121183
申请日期
2001.09.04
申请人
ADVANTEST CORPORATION
发明人
FROSIEN, JUERGEN, DR.;LANIO, STEFAN, DR.
分类号
H01J37/244;H01J37/28
主分类号
H01J37/244
代理机构
代理人
主权项
地址
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