| 摘要 |
PROBLEM TO BE SOLVED: To optimize the beam inclination amount while restraining the bending of a beam and improve manufacturing yield in a micro electromechanical element requiring an inclination in the surface shape of the beam and a manufacturing method thereof. SOLUTION: In this micro electromechanical element and the manufacturing method thereof, a lower electrode 43 is provided with a beam 45 opposite thereto through a space 44 and supported at the end parts, and the beam 45 is provided with a step 51 for causing inclination in the width direction of the beam. The inclination amount of the beam 45 is controlled by selection of a step shape, that is, controlling the step width W3 and the step depth H3. COPYRIGHT: (C)2006,JPO&NCIPI
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