摘要 |
PROBLEM TO BE SOLVED: To provide a solid-state imaging element capable of excellently diffusing and supplying hydrogen into the semiconductor substrate irrespective of the constitution of the semiconductor substrate on the surface side of the same. SOLUTION: The solid-state imaging element 31 is constituted in such a way that a light reception sensor 6 is formed in the semiconductor substrate 4, and a hole 24 is formed on the opposite side to a side where the light reception sensor 6 is formed, and further a hydrogen containing film 25 is formed over the entire surface including the inside of the hole 24. COPYRIGHT: (C)2006,JPO&NCIPI
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