发明名称 VAPOR DEPOSITION FRAME FOR FORMING ELECTRODE OF PIEZOELECTRIC MATERIAL
摘要 <P>PROBLEM TO BE SOLVED: To improve efficiency of a vapor deposition work and vapor deposition gap with respect to a vapor deposition frame for forming electrodes of a piezoelectric blank to be used for forming excitation electrodes on a piezoelectric blank. <P>SOLUTION: This vapor deposition frame consists of a spacer sheet for accommodating and holding a plurality of piezoelectric blanks and first and second mask sheets on which mask holes are arranged corresponding to electrode shapes to be formed for each piezoelectric blank accommodated in the spacer sheet. A resin material film is formed on at least the surfaces of the first and second mask sheets, which contact the spacer. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006074292(A) 申请公布日期 2006.03.16
申请号 JP20040253600 申请日期 2004.08.31
申请人 KYOCERA KINSEKI CORP 发明人 GOTO MASAHIKO;EGUCHI OSAMU
分类号 H03H3/02;C23C14/04;H01L41/18;H01L41/22;H01L41/23;H01L41/29 主分类号 H03H3/02
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