发明名称 |
VAPOR DEPOSITION FRAME FOR FORMING ELECTRODE OF PIEZOELECTRIC MATERIAL |
摘要 |
<P>PROBLEM TO BE SOLVED: To improve efficiency of a vapor deposition work and vapor deposition gap with respect to a vapor deposition frame for forming electrodes of a piezoelectric blank to be used for forming excitation electrodes on a piezoelectric blank. <P>SOLUTION: This vapor deposition frame consists of a spacer sheet for accommodating and holding a plurality of piezoelectric blanks and first and second mask sheets on which mask holes are arranged corresponding to electrode shapes to be formed for each piezoelectric blank accommodated in the spacer sheet. A resin material film is formed on at least the surfaces of the first and second mask sheets, which contact the spacer. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
申请公布号 |
JP2006074292(A) |
申请公布日期 |
2006.03.16 |
申请号 |
JP20040253600 |
申请日期 |
2004.08.31 |
申请人 |
KYOCERA KINSEKI CORP |
发明人 |
GOTO MASAHIKO;EGUCHI OSAMU |
分类号 |
H03H3/02;C23C14/04;H01L41/18;H01L41/22;H01L41/23;H01L41/29 |
主分类号 |
H03H3/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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