| 摘要 |
PROBLEM TO BE SOLVED: To provide a DLC membrane facilitating miniaturization or integration functioning as an optical element, and to provide its forming method. SOLUTION: The DLC membrane continuously changes a refractive index, in at least one widthwise direction from the center O of the membrane. More specifically, the DLC membrane has the refractive index continuously lowered, in at least one widthwise direction from the center O of the membrane and has fuctions such as those of a convex lens. The DLC film continuously increases the refractive index in at least one widthwise direction from the center of the membrane, and has a function as a concave lens. The DLC membrane continuously changes the refractive index in a membrane thickness direction. In addition, the method for forming the DLC membrane continuously changes the refractive index of the DLC membrane, in at least one widthwise direction and at least one direction of the membrane thickness direction from the center of the membrane by the irradiation of energy beam. COPYRIGHT: (C)2006,JPO&NCIPI
|
