| 摘要 |
PROBLEM TO BE SOLVED: To provide an anisotropic conducting sheet and an electrode utilized for the anisotropic conducting sheet to also meet a minuter or narrower pitch electrode. SOLUTION: A bending flat spring shape member is formed by anisotropic etching of single crystal silicon material. A spring electrode 1 made of silicon is manufactured by gold plating the surface of the bending flat spring shape member. The spring electrode 1 is fitted into and fixed on a through hole mounted in a silicone rubber sheet. COPYRIGHT: (C)2006,JPO&NCIPI
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