| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic circuit inspection probe having high reliability to a change of a temperature and a humidity, in electric inspection of an electronic circuit device constituted with a fine circuit line width. SOLUTION: This electronic circuit inspection probe is equipped with an inspection probe terminal group comprising a plurality of inspection probe terminals to be brought into contact with each of a plurality of electrodes arranged in a row at prescribed intervals on an electronic circuit board, and is used for inspection of the electronic circuit by the inspection probe terminal group. The probe is constituted so that each inspection probe terminal is arranged in a row on the probe board surface at approximately the same interval as the interval between each electrode arranged in a row on the electronic circuit board, and that a low expansive material fiber group is formed approximately in parallel with the probe board surface where the inspection probe terminal group is formed and simultaneously in parallel in the crossing direction with the probe terminal group in a domain on the probe board corresponding to a domain where at least the probe terminal group is formed. COPYRIGHT: (C)2006,JPO&NCIPI
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