| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma surface treating device allowing easy replacing of an electrode provided with a passage for a temperature regulating medium. <P>SOLUTION: The plasma surface treating device 10 is provided with branch pipes 50, 60, and pipe connection parts 31, 32 connecting one ends of the branch pipes 50, 60 thereto and allowing the branch pipes 50, 60 to selectively communicate with electrode temperature regulating pipes 61, 62. Gas can thereby flow into the electrode temperature regulating pipes61, 62, 63 and passages 16a, 18a provided in the electrodes 16, 18, from at least one branch pipe 50 through the pipe connection part 31. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
