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发明名称
WAFER CARRIER WITH STACKING ADAPTOR PLATE
摘要
申请公布号
EP1339622(A4)
申请公布日期
2006.03.08
申请号
EP20010986506
申请日期
2001.12.04
申请人
ENTEGRIS, INC.
发明人
GLYNN, PHIL
分类号
B65D21/02;B65D85/00;B65D85/30;B65D85/48;B65D85/86;B65G49/07;H01L21/673;H01L21/68
主分类号
B65D21/02
代理机构
代理人
主权项
地址
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