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发明名称
Substrate loading apparatus
摘要
申请公布号
EP1217647(B1)
申请公布日期
2006.03.08
申请号
EP20000311559
申请日期
2000.12.21
申请人
OXFORD INSTRUMENTS PLASMA TECHNOLOGY LIMITED;UNIVERSITAET GESAMTHOCHSCHULE KASSEL
发明人
CROAD, ROGER J. W.;GOODYEAR, ANDREW L.;RANGELOW, IVAYLO W.;VOLLAND, BURKHARD
分类号
H01L21/677;H01L21/00;H01L21/687
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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