METHOD FOR MANUFACTURING HUMIDITY SENSOR BY USING POROUS SILICON LAYER AND SENSOR MANUFACTURED BY IT,申请号KR20040069905-传众专利搜索

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发明名称	METHOD FOR MANUFACTURING HUMIDITY SENSOR BY USING POROUS SILICON LAYER AND SENSOR MANUFACTURED BY IT
摘要
申请公布号	KR20060021082(A)	申请公布日期	2006.03.07
申请号	KR20040069905	申请日期	2004.09.02
申请人	RESEARCH INSTITUTE OF INDUSTRIAL SCIENCE & TECHNOLOGY	发明人	JUNG, WOO CHUL;KIM, KWANG IL
分类号	G01N27/12	主分类号	G01N27/12
代理机构		代理人
主权项
地址

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