Acceleration switch

摘要

An acceleration switch and method therefor includes providing a conductive substrate and an insulating cap. A recessed area is formed in the insulating cap. An insulating layer is disposed on the conductive substrate. A conductive layer is disposed on the insulating layer. The conductive layer is etched to form a cantilever beam and an electrically isolated island. The insulating layer is etched around the cantilever beam to free the cantilever beam to move. Contacts are disposed on the cantilever beam and in the recessed area such that the contacts are able to electrically contact each other upon application of an acceleration to the switch. The cap is bonded to the conductive layer to hermetically seal the cantilever beam.