发明名称 ANTIREFLECTION FILM, OPTICAL ELEMENT, ALIGNER, AND METHOD FOR MANUFACTURING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide an antireflection film which exhibits excellent antireflection effect to light with various incident angles and can reduce the adverse influences on an optical system, such as flare or ghost. <P>SOLUTION: The antireflection film is composed of at least eight layers formed on the surface of a substrate and used to light having a prescribed wavelength. First, third, fifth and seventh layers successively arranged from the surface of the substrate are each composed of a material having a refractive index higher than that of the substrate to the prescribed wavelength, and second, fourth, sixth and eighth layers successively arranged from the surface of the substrate are each composed of a material having a refractive index lower than that of the substrate to the prescribed wavelength. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006058779(A) 申请公布日期 2006.03.02
申请号 JP20040242652 申请日期 2004.08.23
申请人 CANON INC 发明人 YAZAKI YOICHI
分类号 G02B1/11;B32B7/02;C03C17/34;G03F7/20;H01L21/027 主分类号 G02B1/11
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