| 摘要 |
PROBLEM TO BE SOLVED: To suppress non-linear property of output pressure for moving and driving a spool and suppress noise of output pressure in a gas pressure control valve. SOLUTION: The spool 10 of the gas pressure control valve is moved and driven in the axial direction by a linear motor. Inside diameter of a sleeve 12 has a stepped structure and therefore the diameter A in a left side land part 16 of the spool 10 is larger than the diameter B in a right side land part 18. A central land part 14 has a first flange 20 having the diameter A and a second flange 22 having the diameter B and a section between them is connected by a shaft part having a diameter D. Although output pressure P in a control pressure chamber 34 is changed by relative positional relation of a load port 28 of the sleeve 12 and the central land part 14, driving current I and output pressure P of the linear motor have proportional relation because the spool 10 and the sleeve 12 have a stepped structure. A slit restriction for streamlining flow of gas is provided in the load port 28. COPYRIGHT: (C)2006,JPO&NCIPI
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