发明名称 METHOD AND APPARATUS FOR MEASURING THREE DIMENSIONAL SHAPE
摘要 PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring method etc. capable of speedily measuring the surface shape of an object to be measured by a simple constitution. SOLUTION: The three-dimensional shape measuring method comprises a first surface shape measuring step for measuring the shape of the surface 102a of the object to be measured 102; a first position detection step for detecting the positional relation of a jig 103 to an axis of rotation 105c by at least a pair of position detectors A1 and B1; an object-to-be-measured reversing step for reversing the object to be measured 102; a second position detection step for detecting the positional relation of the reversed jig 103 to the axis of rotation 105c by at least the pair of position detectors A1 and B1; and a coordinate transformation step for performing coordinate transformation on measurement results of the first surface shape measuring step on the basis of detection results of the first position detection step and performing coordinate transformation on measurement results of the second surface shape measuring step on the basis of detection results of the second position detection step. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006052998(A) 申请公布日期 2006.02.23
申请号 JP20040233981 申请日期 2004.08.11
申请人 OLYMPUS CORP 发明人 KOBAYASHI HIROSHI
分类号 G01B21/20 主分类号 G01B21/20
代理机构 代理人
主权项
地址