MICRO-DISCHARGE SENSOR SYSTEM

摘要

A micro plasma sensor system having a glow discharge gap formed by electrodes. A fluid to be sensed may be brought into the vicinity of a discharge at the gap. Light from the discharge may be coupled to a spectrum analyzer and/or processor for determining properties of the fluid. A coupling may include a waveguide proximate to the discharge gap. Window cleanliness and electrode electrical isolation may be maintained by the discharge. The optical analyzer may have filters for one or more optical channels to detectors. The detectors may output electrical signals to be processed. The electrodes may be parallel to each other with a light waveguide between them. Or the electrodes may be concentric forming an annular discharge gap. The light waveguide may likewise be concentric to one or more electrodes. The waveguide may be one or more optical fibers, or tubular.