发明名称 |
A NONPLANAR X-RAY TARGET ANODE FOR USE IN A LAMINOGRAPHY IMAGING SYSTEM |
摘要 |
An x-ray laminography imaging system that utilizes a nonplanar anode target to enable objects that are oblique to the direction of projection of electron beams onto the target to be precisely imaged. Because many objects that laminography techniques are used to inspect are oblique or have portions that are oblique, the nonplanar anode target of the present invention enables enables spot patterns to be traced that are parallel to the plane of the object, regardless of whether it is oblique or orthogonal. |
申请公布号 |
GB2396541(B) |
申请公布日期 |
2006.02.22 |
申请号 |
GB20030015025 |
申请日期 |
2003.06.26 |
申请人 |
AGILENT TECHNOLOGIES, INC.;AGILENT TECHNOLOGIES, INC.;AGILENT TECHNOLOGIES, INC. |
发明人 |
BARRY EPPLER;RONALD K KERSCHNER |
分类号 |
G01N23/04;H01J35/08;H01J35/30 |
主分类号 |
G01N23/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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