发明名称 THERMAL ANEMOMETRY MASS FLOW MEASUREMENT APPARATUS AND METHOD
摘要 A mass flow measurement apparatus including a flow path defined by a tubular side wall, a probe extending through the side wall into the flow path so that a first portion of the probe is located in the flow path and a second portion of the probe extends out of the side wall, a heater element secured to the probe, and a seal preventing fluid flowing through the flow path from contacting the heater element.
申请公布号 KR20060015730(A) 申请公布日期 2006.02.20
申请号 KR20057021900 申请日期 2005.11.16
申请人 MKS INSTRUMENTS, INC. 发明人 SHAJII ALI;KOTTENSTETTE NICHOLAS E.;MYATT LEONARD R.;ANASTAS JEFFREY V.
分类号 G01F1/68;G01F1/684;G05D7/06 主分类号 G01F1/68
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