| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an image inspecting method for inspecting a blocked feature blocked by a blocking features with high precision. <P>SOLUTION: A morphological filter is applied to an original image including a grid 304 as blocking features and traces 320 and 330 as blocked features, and a filter image with grid 304 removed is applied. Edge detection of the filter image using a line tool 610 is performed, and substantial position of the edge is detected. Subsequently, the image inspecting device returns to the original image, and detects the edge position using the line tool 610. At this time, the line tool 610 is shorter than that in the case where it is utilized in the edge detection in the filter image, and the edge detected range is narrowed to the proximity of the approximate edge position detected about the filter image. Thus, the line tool 610 can perform edge detection with high precision, without receiving the effect of the grid 304. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
