| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for preventing a fine structure from collapsing and for efficiently developing, cleaning or etching. SOLUTION: The method for manufacturing a fine structure includes the steps of: exposing a resin layer on a substrate by lithography; and supplying a developing solution to the resin layer after being exposed to form a resin die, wherein vibration in a megahertz band is added to the developing solution to be supplied. COPYRIGHT: (C)2006,JPO&NCIPI |
