| 摘要 |
PROBLEM TO BE SOLVED: To realize a MEMS element that has high reliability and less surface sticking inside by means of a simple process, as a VC type MEMS element. SOLUTION: The MEMS element has a basic structure consisting of a support substrate 11, an insulating layer 12, and an upper layer 13. The upper layer 13 is formed with a mirror part 21, hinge parts 22, 23, a pair of anchor parts 24, 25, and comb-teeth parts 26, 27, 28, 29. The anchor parts 24, 25 and the comb-teeth parts 28, 29 opposite to the comb-teeth parts 26, 27 are formed on the support substrate 11 through the insulating layer 12. Stiction pads 30, 31 connected to the mirror part are adhered directly to the support substrate 11 without interposing the insulating layer 12. As a result, the displacement of the stiction pads 30, 31 can be converted to the displacement of the mirror part 21. COPYRIGHT: (C)2006,JPO&NCIPI
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