| 摘要 |
PROBLEM TO BE SOLVED: To provide an observation system which allows accurate observation and realizes observation per short unit time without complicated handwork. SOLUTION: The observation system comprises a dot formation means for forming dots on a surface of an object to be observed and an observation means for observing the dots formed on the surface of the object to be observed by the dot formation means. The dot formation means comprises a coating means for discharging flying droplets of a liquid having predetermined viscosity onto the surface of the object to be observed, a positioning means for altering the relative positional relationship between the coating means and the object to be observed and positioning them at a predetermined position, and a first control means for controlling the coating means and the positioning means to form the dots on the surface of the object to be observed. COPYRIGHT: (C)2006,JPO&NCIPI
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