| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact hold structure at the tip of a transport arm that surely holds a substrate during a turn or extension via simple mechanism and releases it easily at that position. SOLUTION: A transport device hold mechanism 10 enables a transport arm capable of driving straight ahead with a substrate W to turn around a turn shaft and transport a substrate W. A control plate 35 of magnets is provided that turns together with the turn arm and moves in the straight advancement of the transport base plate 8 provided at the tip of the transport arm. The transport base plate 8 approaches the control plate 35 as the transport arm shrinks or extends, a permanent magnet 32 provided at a part of the crank 30 on the transport base plate 8 is attracted to the control plate 35, the crank 30 is rotated around the support, and a slide 13 is converted to the linear motion. In the region of the control plate 35 in which the magnetic attraction of the permanent magnet 32 acts on, the substrate W is held at the tip of the substrate hold arm 12 at the top of the slide 13. COPYRIGHT: (C)2006,JPO&NCIPI |
