| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine pattern forming method of a functional material. SOLUTION: In this fine pattern forming method, functional material of a raw material for a catalyst or a resistor is designed and prepared, while the fine structure thereof is controlled, the raw material for the catalyst or the resistor is delivered, while a dispenser three-dimensionally, to be applied in a prescribed position on a substrate with a prescribed pattern is moved; and a fine pattern is formed thereby under the condition where the fine structure including a shape of a particle of a main component in the functional material and including a distribution state thereof is controlled, in a gas sensor for detecting, as a detection signal, the heat generated by a catalytic reaction of an inflammable gas with a catalytic material, or a thermoelectric generator for converting heat into electricity. The present invention provides also the gas sensor and the thermoelectric generator formed with the fine pattern. COPYRIGHT: (C)2006,JPO&NCIPI
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