发明名称 STAGE APPARATUS, FIXATION METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE PRODUCING METHOD
摘要 A stage apparatus has a movement member movable with a plate-like body placed on a placement surface. The stage apparatus has a fixing device for fixing the plate-like body on the placement surface, and the fixing device fixes the plate-like body in conjunction with passage of the movement member through a predetermined first area.
申请公布号 KR20060014390(A) 申请公布日期 2006.02.15
申请号 KR20057021091 申请日期 2004.06.03
申请人 NIKON CORPORATION 发明人 SHIBAZAKI YUICHI
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
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