PREPARATION OF A NANOSTRUCTURE BY FOCUSED PATTERNING OF NANOPARTICLES AND NANOSTRUCTURE OBTAINED THEREBY

摘要

A manufacturing method of a nano particle structure with concentration patterning of a nano particle and the nano particle structure gained by the same are provided to produce the nano particle structure efficiently by generating the nano particles and ions at the same time or separately. A manufacturing method of a nano particle structure includes the following steps of: forming an electric field after locating a substrabe(8) having a nano pattern in a reactor(11); forming the nano particles and the ions by discharging a nano particle precursor(1); and evaporating the nano particles on the nano patterns of the substrate. A spark discharge is generated by authorizing voltage in a range of 5 ~ 10 kV to a spark discharge chamber.