| 摘要 |
PROBLEM TO BE SOLVED: To provide an electret actuator capable of providing stable driving and high reliability. SOLUTION: This is the electret actuator including a fixed substrate 100 having a driving electrode 101 constituted of a plurality of phases, a movable element 200 which is disposed on the fixed substrate 100, has an electret range 201 facing the driving electrode 101 and can relatively move to the fixed substrate 100 by static electricity working at a space to the driving electrode 101, and a driving control section 300 generating a driving pattern for relatively moving the movable element 200 to the fixed substrate 100 and applying the pattern to the driving electrode 101. The driving control section 300 sets an absolute value of a voltage in a driving pattern when starting at a value larger than the absolute value of the voltage in the applied driving pattern during movement. COPYRIGHT: (C)2006,JPO&NCIPI
|
