Metallfolienkaschierte keramische Palette und Verfahren zu deren Herstellung

摘要

A metal-foil-clad composite ceramic board comprises a resin-impregnated sintered substrate (IIR) comprising a 0.2 to 10 mm thick sintered substrate (II) of an inorganic continuously porous sintered body (I) having a true porosity of 12 to 50% and an open porosity of at least 10%, impregnated with a thermoset resin (R), and a metal foil; the resin-impregnated sintered substrate (IIR) and the metal foil being stacked and press-formed, the stacked metal foil having a 10-point average surface roughness Rz or 10 mu m or less, and the resin-impregnated sintered substrate (IIR) and the metal foil having substantially no adhesive layer therebetween or having an adhesive layer having a thickness of 10 mu m or less therebetween.