发明名称 HIGH-DEFORMATION COMPOSITE MICRORESONATOR
摘要 <p>The invention concerns an electromechanical resonator comprising a vibrating body (4), at least one excitation electrode (14, 16) and at least one detection electrode (10, 12), characterized in that the vibrating body comprises a first portion (20) made of a first material, with a first Young modulus, and a second portion (22), made of a second material, with a second Young modulus, lower than the first Young modulus, said second portion being located at least partly opposite the detection electrode (10,12).</p>
申请公布号 WO2006013301(A1) 申请公布日期 2006.02.09
申请号 WO2005FR50520 申请日期 2005.06.29
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;TRIPARD, AMYOT;BRECHET, YVES 发明人 TRIPARD, AMYOT;BRECHET, YVES
分类号 B81B3/00;H03H3/007;H03H9/46;(IPC1-7):H03H9/46 主分类号 B81B3/00
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