| 发明名称 |
alpha-UNSATURATED ACYLOXY-gamma-BUTYLOLACTONE DERIVATIVE, POLYMER COMPOUND AND RESIN COMPOSITION FOR PHOTORESIST |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compound having a new lactone skeleton which is useful as a constituent monomer for photoresist resins. <P>SOLUTION: The α-unsaturated acyloxy-γ-butylolactone derivative is represented by formula (1) (wherein R<SP>a</SP>is a hydrogen atom, a halogen atom, a 1-6C alkyl group or a 1-6C haloalkyl group;R<SP>b</SP>is an acid-leaving group; R<SP>1</SP>and R<SP>2</SP>are same or different and they are each a hydrocarbon group and R<SP>1</SP>and R<SP>2</SP>may mutually be combined to form a ring together with an adjacent carbon atom; R<SP>3</SP>and R<SP>4</SP>are same or different and they are each hydrogen atom or a hydrocarbon group). <P>COPYRIGHT: (C)2006,JPO&NCIPI |
| 申请公布号 |
JP2006036891(A) |
申请公布日期 |
2006.02.09 |
| 申请号 |
JP20040217765 |
申请日期 |
2004.07.26 |
| 申请人 |
DAICEL CHEM IND LTD |
发明人 |
KOYAMA YUTAKA;SUMITA MARI |
| 分类号 |
C08F220/28;C07B61/00;C07D307/33;C08F232/00;G03F7/039;H01L21/027 |
主分类号 |
C08F220/28 |
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