| 摘要 |
PROBLEM TO BE SOLVED: To provide equipment for processing the central part and the outer circumferential part of a rotary driven substrate substantially uniformly with processing liquid imparted with ultrasonic vibration. SOLUTION: The equipment for processing the upper surface of a substrate rotary driven under horizontal state with processing liquid imparted with ultrasonic vibration comprises a body 32 having branch channels 35a-35c for supplying processing liquid from the radially central part to the peripheral part on the upper surface of the rotating substrate, a junction 36, a collective channel 37 and a spread groove 38, and a vibrator 34 provided in the body in order to impart ultrasonic vibration to the processing liquid being supplied onto the upper surface of the substrate, and increasing the ultrasonic vibration imparting area for the processing liquid depending on variation in circumferential speed which increases from the rotational central part toward the peripheral part of the substrate. COPYRIGHT: (C)2006,JPO&NCIPI
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