SPECTROSCOPIC SENSOR AND ELECTRONIC APPARATUS

摘要

A spectroscopic sensor has plural angle limiting filters that limit incident angles of incident lights, plural light band-pass filters that transmit specific wavelengths, and plural photodiodes to which corresponding transmitted lights are input. The spectroscopic sensor is a semiconductor device in which the angle limiting filters, the light band-pass filters, and the photodiodes are integrated, and, assuming that the surface on which impurity regions for the photodiodes are formed is a front surface of a semiconductor substrate, holes for receiving lights are formed in the impurity regions from the rear surface side.

主权项

1. A spectroscopic sensor comprising:
a photodiode that has an impurity region in a semiconductor substrate; and an angle limiting filter that limits an incident angle of an incident light to a light receiving surface of the photodiode, the angle limiting filter formed on the impurity region, wherein, the angle limiting filter comprises a plurality of substantially vertically extended substrate portions of said semiconductor substrate, and a light blocking material is directly provided on side surfaces of the substantially vertically extended substrate portions.