Integrated semiconductor structure for reliability tests of dielectrics

摘要

A test structure for assessing the reliability of a dielectric of a circuit element in an integrated circuit includes a plurality of test circuit elements and a plurality of contact pads, wherein at least some of the test circuit elements share one or more of the contact pads. In this way, a failure event can be detected with a reduced number of contact pads, thereby significantly reducing the area of floor space occupied by the test structure.