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发明名称
METHOD FOR FABRICATING FERROELECTRIC CAPACITOR IN SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20060011641(A)
申请公布日期
2006.02.03
申请号
KR20040060572
申请日期
2004.07.30
申请人
HYNIX SEMICONDUCTOR INC.
发明人
YANG, YOUNG HO
分类号
H01L27/105
主分类号
H01L27/105
代理机构
代理人
主权项
地址
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