Verfahren zur Reduzierung von Artefakterscheinungen in der Raster-Elektronenmikroskopie,申请号DE19996025430T-传众专利搜索

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发明名称	Verfahren zur Reduzierung von Artefakterscheinungen in der Raster-Elektronenmikroskopie
摘要
申请公布号	DE69925430(T2)	申请公布日期	2006.02.02
申请号	DE19996025430T	申请日期	1999.09.23
申请人	APPLIED MATERIALS, INC.	发明人	DOTAN, NOAM
分类号	H01J37/22;H01J37/28	主分类号	H01J37/22
代理机构		代理人
主权项
地址

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