HUMIDITY SENSOR MATERIAL, HUMIDITY SENSOR USING THE HUMIDITY SENSOR MATERIAL, AND ELECTRIC APPLIANCE EQUIPPED WITH THE HUMIDITY SENSOR MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a humidity sensor material in which electrical conductivity varies to a large extent in response to humidity variation, and to provide a humidity sensor and electric appliance both using the above material.

SOLUTION: This porous humidity sensor material contains at least an SiO2component and has numerous both end-opened cylindrical pores. The average diameter of the pores is less than 5 nm, and the standard deviation (σ) of the pore diameter is 2-4 nm.

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