发明名称 Failsafe switching of intelligent controller method and device
摘要 The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.
申请公布号 US2006025871(A1) 申请公布日期 2006.02.02
申请号 US20040948085 申请日期 2004.09.23
申请人 MKS INSTRUMENTS, INC. 发明人 KHALIL NIDAL;SIFNATSCH GUENTER;LEV-AMI UZI;HADAR RON
分类号 G05B11/01;G05B9/02 主分类号 G05B11/01
代理机构 代理人
主权项
地址