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发明名称
SOI Kontaktstruktur(en) und zugehöriges Herstellungsverfahren
摘要
申请公布号
DE112004000646(D2)
申请公布日期
2006.02.02
申请号
DE200411000646
申请日期
2004.01.30
申请人
X-FAB SEMICONDUCTOR FOUNDRIES AG
发明人
RICHTER, STEFFEN;NUERNBERGK, DIRK;GOETTLICH, WOLFGANG
分类号
H01L21/74
主分类号
H01L21/74
代理机构
代理人
主权项
地址
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