PROBE AND MINUTE SAMPLE PICKUP MECHANISM

摘要

PROBLEM TO BE SOLVED: To provide a mechanism having a contact sensing function of a sample and a probe applying no damage to the sample at the time of the approach to the sample, capable of rapidly and certainly handling the minute sample, not selecting the material of the sample and having a simple structure. SOLUTION: This probe mechanism and the sample pickup mechanism have a leading end member comprising a needle-like body which achieves the contact with the sample provided to an observation device or an analyzer and is equipped with a driving electrostatic actuator and a means for monitoring the change in the electrostatic capacity between the electrodes of the electrostatic actuator. The contact of the probe with the sample can be detected by the monitor means. COPYRIGHT: (C)2006,JPO&NCIPI