| 摘要 |
PROBLEM TO BE SOLVED: To prevent dry irregularity generated when a substrate is adsorbed to a stage to carry out drying in a thin film forming process using a liquid droplet discharge method. SOLUTION: A stage device is used for adsorbing to hold the substrate 11 when a droplet placed on the substrate 11 is dried. The stage device includes a mounting table 4 on which an adsorption hole 4a is formed to adsorb the substrate 11, wherein the adsorption hole 4a is placed on an area other than the thin film formation area F of the substrate 11. COPYRIGHT: (C)2006,JPO&NCIPI |
