发明名称 Preparation of crosslinked particles from polymers having activatible crosslinking groups
摘要 Crosslinked particles are provided that are useful in the manufacture of dielectric materials for use in electronic devices such as integrated circuits. The crosslinked particles are prepared by activating crosslinkable groups on synthetic polymer molecules, where the crosslinkable groups are inert until activated and, when activated, undergo an irreversible intramolecular crosslinking reaction to form crosslinked particles.
申请公布号 US6992115(B2) 申请公布日期 2006.01.31
申请号 US20040775713 申请日期 2004.02.09
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 HAWKER CRAIG JON;MILLER ROBERT DENNIS;HEDRICK JAMES LUPTON;LEE VICTOR YEE-WAY
分类号 C08J3/12;C08J3/24;C08J3/28;C08J9/04;H01L21/312;H01L21/316;H01L21/768;H01L23/522 主分类号 C08J3/12
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