发明名称 |
Method for enhancing fluorine utilization |
摘要 |
A process for enhancing the fluorine utilization of a process gas that is used in the removal of an undesired substance from a substrate is disclosed herein. In one embodiment, there is provided a process for enhancing the fluorine utilization of a process gas comprising a fluorine source comprising: adding a hydrogen source to the process gas in an amount sufficient to provide a molar ratio ranging from about 0.01 to about 0.99 of hydrogen source to fluorine source.
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申请公布号 |
US2006017043(A1) |
申请公布日期 |
2006.01.26 |
申请号 |
US20040897811 |
申请日期 |
2004.07.23 |
申请人 |
WU DINGJUN;JI BING;KARWACKI EUGENE J JR |
发明人 |
WU DINGJUN;JI BING;KARWACKI EUGENE J.JR. |
分类号 |
C09K3/00;B08B6/00 |
主分类号 |
C09K3/00 |
代理机构 |
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代理人 |
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地址 |
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