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发明名称
HALBLEITERVORRICHTUNG
摘要
申请公布号
DE60019144(T2)
申请公布日期
2006.01.26
申请号
DE20006019144T
申请日期
2000.08.23
申请人
TOKO, INC.
发明人
HOSONO, RINYA;KOUCHI, TAKEYUKI;KIYA, YUKINORI;SOGABE, TAKASHI
分类号
H01L27/04;G05F1/56;G05F1/575;H01L21/822
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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